| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems, wherein in a near-field scanning microscope that uses an aperture probe, the upper limit of the aperture formation is at most several tens of nms in practice, in a near-field scanning microscope that uses a scatter probe, the resolution ability is limited to at most several tens of nms, because of the external illuminating light serving as background noises, and moreover, the measurement reproducibility is markedly lower due to damages or abrasion of a probe. SOLUTION: Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility, while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability, by combining a nm-order cylindrical structure with nm-order microparticles, and repeatedly moving the probe toward the sample and away therefrom with a small contact force at individual measurement points on the sample. COPYRIGHT: (C)2009,JPO&INPIT |
