| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma-treating furnace with which the temperature distribution in a material to be treated is improved and the generation of uneven treatment can be prevented. SOLUTION: In the plasma-treating furnace 4, surroundings of the material 2 to be treated in a treating chamber S2 is provided with a heat-shading material 63, and in the heat shading material 63, an opening hole part 81 is arranged. Further, the opening hole part 81 is made to open/close with a cover material 83, and in this way, the heat in the heat-shading material 63 is made to exhaust to the outside. The heat-shading material 63 is arranged at the side parts and the upper part of the material 2 to be treated and the opening hole part 81 is arranged at the upper part of the material 2 to be treated. Furthermore, the inlet side of the heat-shading material 63 is provided with an inlet side heat-shading door 64 for opening/closing the inlet side and the outlet side heat-shading material 63 is provided with an outlet side heat-shading door 65 for opening/closing the outlet side, and in the inside of the heat-shading material 63, a heater 62 is provided, and in the furnace body 51, a cooling water passage 68 is included. COPYRIGHT: (C)2009,JPO&INPIT |
