| 摘要 |
PROBLEM TO BE SOLVED: To further efficiently irradiate an irradiation object via a window foil section with an electron beam. SOLUTION: A positive electrode 22 is arranged on the inner diameter side in a double cylindrical body 20 having the window foil section 12 on the inner diameter side and around the window foil section, an annular cold negative electrode 24 with a carbon film for electric field radiation is arranged at a position on the outer diameter side of the positive electrode and facing the window foil section, and an electron beam shielding member 28 that has a substantially the same potential as the cold negative electrode 24 and shields the electron beam from the cold negative electrode 24 is arranged around the cold negative electrode 24. COPYRIGHT: (C)2009,JPO&INPIT
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