| 摘要 |
PROBLEM TO BE SOLVED: To realize a constitution for sealing both electrodes without using a package member other than a semiconductor substrate constituting movable and fixed electrodes, concerning an acceleration sensor equipped with the movable electrode and the fixed electrode facing thereto, for detecting an acceleration based on a change of a detection interval between both electrodes when the acceleration is applied thereto. SOLUTION: A first semiconductor substrate 10 and a second semiconductor substrate 20 are piled with each one face 10a, 20a in the thickness direction facing each other, and the movable electrode 30 is formed by patterning one surface 10a of the first semiconductor substrate 10, and the fixed electrode is formed by patterning one surface 20a of the second semiconductor substrate 20. The movable and fixed electrodes 30, 40 are faced each other through the detection interval K between both semiconductor substrates 10, 20, and both semiconductor substrates 10, 20 are bonded together on the peripheries thereof, and both electrodes 30, 40 are sealed between both semiconductor substrates 10, 20 by the bonding part 50. COPYRIGHT: (C)2009,JPO&INPIT
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