| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of highly accurately measuring the surfaces of objects to be inspected. SOLUTION: The measuring apparatus for measuring the surfaces of an object to be inspected on the basis of measuring light from a light source irradiating the object to be inspected and an optical return reflected at the object to be inspected includes a deflection part having a reflecting plane rotatable on an axis of rotation to reflect the measuring light from the reflecting plane to the object to be inspected and guide a returning optical return reflected at the object to be inspected to an optical path of the measuring light; a monitoring light projection part for projecting monitoring light projected to the reflecting plane in such a way as to be reflected in a direction different from the measuring light; a light condensing part for condensing the monitoring light reflected at the reflecting plane along a direction corresponding to the axis of rotation; and a tilt detection part for detecting the tilt of the axis of rotation by detecting the position of the condensed monitoring light in the direction corresponding to the axis of rotation. COPYRIGHT: (C)2009,JPO&INPIT
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