发明名称 MEASUREMENT HEAD REGULATOR, AND MEASUREMENT HEAD REGULATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a measuring head regulator capable of facilitating regulation for a measuring head, and capable of regulating even the plurality thereof in a short time. SOLUTION: The aligned measuring heads 11 are fixed to a measuring head holder 17, a work W fixed to a work holder 12 is moved relatively to the measuring heads 11 along X-, Y- and Z-directions by a slider 13, so as to position the slider 13, the measuring heads 11 are removed from the measuring head holder 17 after the slider 13 is fixed, the new measuring heads 11 are fixed to the measuring head holder 17, and the fixed new measuring heads 11 are regulated therein. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008256372(A) 申请公布日期 2008.10.23
申请号 JP20070095415 申请日期 2007.03.30
申请人 TOKYO SEIMITSU CO LTD 发明人 NAGATSUKA MASASHI
分类号 G01B5/00 主分类号 G01B5/00
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