摘要 |
PROBLEM TO BE SOLVED: To provide a measuring head regulator capable of facilitating regulation for a measuring head, and capable of regulating even the plurality thereof in a short time. SOLUTION: The aligned measuring heads 11 are fixed to a measuring head holder 17, a work W fixed to a work holder 12 is moved relatively to the measuring heads 11 along X-, Y- and Z-directions by a slider 13, so as to position the slider 13, the measuring heads 11 are removed from the measuring head holder 17 after the slider 13 is fixed, the new measuring heads 11 are fixed to the measuring head holder 17, and the fixed new measuring heads 11 are regulated therein. COPYRIGHT: (C)2009,JPO&INPIT
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