FIRING FURNACE AND FIRING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a firing furnace and a firing method capable of uniformly cooling a glass substrate in a short time without deforming and cracking the glass substrate. SOLUTION: In this firing furnace for firing the glass substrate 10 by allowing the glass substrate 10 loaded on a setter 11 to pass through a heating chamber 5 and a cooling chamber 7 while being conveyed, the cooling chamber 7 is provided with a cooling means and a measuring means for measuring a condition of the glass substrate 10, and the cooling means is controlled on the basis of a result of the measurement by the measuring means. As cooling by the cooling means can be performed according the condition of the glass substrate 10, firing can be performed while suppressing deforming and cracking. COPYRIGHT: (C)2009,JPO&INPIT