| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner capable of avoiding deterioration in the precision of measurement using a member for measurement, and to provide a method of manufacturing a device. SOLUTION: The aligner related to a first aspect of the invention is an aligner exposing a substrate via liquid. The aligner has: a projection optical system projecting light from an original; a substrate stage holding and moving the substrate; a liquid supply section for supplying the liquid to the clearance between the final surface of the projection optical system and the substrate held by the substrate stage; the member for measurement provided on the substrate stage; and a blowing means for blowing gas on the member for measurement. The blowing means adjusts humidity in the gas blowing on the member for measurement. COPYRIGHT: (C)2009,JPO&INPIT
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