| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method and a surface treatment device in which, in surface treatment working of working the surface of the object to be treated, so as to be a satin-finished shape, the stages of mask formation, mask removal and cleaning are eliminated, and further, an optional roughness distribution can be imparted to the surface of the satin-finished region. SOLUTION: In the surface treatment device 1 in which an electron beam is emitted to the surface of the object W to be treated, so as to form ruggedness on the surface of the object W to be treated, the device is provided with: a storage means 19 storing a treatment objective region where an electron beam is emitted to the surface of the object W to be treated, an emission point at which the electron beam is emitted in the treatment objective region, the shape information on the surface of the object to be treated and the set value of the beam current or focused current of the electron beam; and a controller 9 where control is performed in such a manner that the electron beam is emitted by selecting the irradiation point at random based on the treatment objective region, the emission point, the shape information and the set value stored in the storage means 19. COPYRIGHT: (C)2009,JPO&INPIT
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