| 摘要 |
PROBLEM TO BE SOLVED: To inspect the shape of a metal surface or the like at high spatial resolution in an X-ray inspection device. SOLUTION: The X-ray inspection device irradiates an X-ray irradiation section 30 of an analyte 1 with X-rays 6 and inspects the surface shape of the analyte 1. The X-ray inspection device has an X-ray source 2 for irradiating the X-ray irradiation section 30 with the original X-rays 6, a plurality of X-ray detectors 4 that are arranged at an interval in a state facing the X-ray irradiation section 30 so as to detect a secondary X-rays (scattered X-rays 7 or fluorescent X-rays) released from each part of the X-ray irradiation section 30 according to the irradiation of the original X-rays 6 and detect two-dimensional X-ray intensity distribution, and a plurality of suppressing means (for example, collimator 3) that are arranged between the X-ray irradiation section 30 and X-ray detectors 4 and suppress depth angle of the secondary X-rays 7 reaching respective X-ray detectors 4. COPYRIGHT: (C)2009,JPO&INPIT
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