| 摘要 |
<p>A multi-laser system is provided to reduce a processing time and to enhance productivity by performing all processing works with only one system. A first laser oscillator(110) outputs a first laser beam. A second laser oscillator(120) outputs a second laser beam. A first scanner couple(131) receives the first laser beam from the first laser oscillator and deflects the first laser beam to a desired position on a substrate. A second scanner couple(132) receives the second laser beam from the second laser oscillator and deflects the second laser beam to a desired position on the substrate. A shuttle unit(150) is arranged between the first laser oscillator and the first scanner couple and between the second laser oscillator and the second scanner couple in order to transmit or shield incident laser beams. A scan lens(140) receives the laser beams through the scanner couples in order to concentrate the laser beams on a spot of a predetermined diameter and to irradiate the concentrated laser beams onto the substrate.</p> |
