发明名称
摘要 The present invention relates to a new and improved device adapted for mounting semiconductor components to substrates. More particularly, the device includes a housing and a first member rotatably mounted to the housing. A first interface is formed between the first member and the housing. The device also has a second member mounted in the first member and movable in an axial direction relative to the first member between a first position and a second position. The second member has an engaging mechanism at an end thereof for engaging a semiconductor component. A second interface is formed between the first and second members. The device is also provided with a supplying mechanism for supplying pressurized air to the first and second interfaces so as to form a first air bearing at the first interface and a second air bearing at the second interface.
申请公布号 JP4168177(B2) 申请公布日期 2008.10.22
申请号 JP20030537105 申请日期 2002.09.20
申请人 发明人
分类号 H01L21/60;H01L21/00;H01L21/52 主分类号 H01L21/60
代理机构 代理人
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