THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE
摘要
<p>A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.</p>
申请公布号
EP1982219(A2)
申请公布日期
2008.10.22
申请号
EP20070711155
申请日期
2007.01.24
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.