发明名称 SUBSTRATE TRANSFERING APPARATUS FOR MANUFACTURING FLAT PANEL DISPLAY DEVICES
摘要 A flat panel transferring apparatus of flat panel manufacturing equipment is provided to accurately and easily transfer a flat panel by controlling a transfer process in response to various sizes of the flat panel. A flat panel transferring apparatus of flat panel manufacturing equipment includes a flat panel transfer unit and a guide unit. The flat panel transfer unit is arranged in a process chamber, transfers a flat panel, and includes shafts(110), rollers(120), a power transmission(130), and a first driving unit(140). The shafts are arranged in parallel with each other vertically to a transfer direction of the flat panel. The rollers are installed on the shafts and rotate with the shaft to transfer the flat panel. The power transmission is coupled to the shafts and transmits power to the shafts. The first driving unit transmits torque to the power transmission unit. The guide unit guides sides of the flat panel transferred by the flat panel transfer unit.
申请公布号 KR20080093824(A) 申请公布日期 2008.10.22
申请号 KR20070038060 申请日期 2007.04.18
申请人 SEMES CO., LTD. 发明人 SHIN, JAE YOON
分类号 B65G13/00;B65G39/02;G02F1/13 主分类号 B65G13/00
代理机构 代理人
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