| 摘要 |
<p>This invention discloses a stage apparatus which has a stage (202) and moves the stage (202) in at least a first direction. The stage apparatus includes a holding unit (208) fixed on the stage (202) to extend in the first direction. The holding unit (208) includes a first portion and a second portion (213) inserted between the first portion and the stage (202). The first portion includes a holding surface which holds an object (201). The length of the second portion (213) in the first direction is less than that of the first portion.</p> |
