SUPPORTING PIN PRODUCING METHOD, SUPPORTING PIN, HEAT PROCESSING APPARATUS AND SUBSTRATE INCINERATOR

摘要

A method for fabricating a support pin is provided to fabricate a support pin with high endurance even when the support pin is used in a high temperature condition by forming a molding product in an atmosphere in which the content density of oxygen and/or moisture is not higher than 10 ppm(parts per million) and by forming a passivation layer on the surface of the molding product. A resin material is injection-molded to be a predetermined pin type in an atmosphere having oxygen and/or moisture with content density not higher than 10 ppm to form a molding product. A passivation layer is formed on the surface of the molding product. The molding product covered by the passivation layer can be incinerated at a temperature higher than a heating process temperature at which a support pin(100) is used.