发明名称 LIFETIME ESTIMATING METHOD FOR HEATER STRAND, HEAT TREATMENT APPARATUS, RECORDING MEDIUM, AND LIFETIME ESTIMATING PROCESS SYSTEM FOR HEATER STRAND
摘要 A method is provided to estimate the lifetime of a heater line as compared with a conventional technique by using data related to a time interval for which the heater line is easily disconnected when the lifetime of the heater line is estimated. The maximum value of power(134A-134E) supplied to a heater line(132A-132E) within a period for increasing the temperature up to a heat treatment temperature is detected. When the maximum value of the power is determined to exceed a previously determined critical value, an alarm process is performed to inform that the lifetime of the heater line comes to an end. The critical value can be predetermined according to the condition of the heat treatment.
申请公布号 KR20080093896(A) 申请公布日期 2008.10.22
申请号 KR20080035037 申请日期 2008.04.16
申请人 TOKYO ELECTRON LIMITED 发明人 TERASAWA NOBUTOSHI;OBATA MINORU;KOYAMA NORIAKI
分类号 H01L21/324;H01L21/205;H01L21/66 主分类号 H01L21/324
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