| 摘要 |
A catadioptric imaging optical system with a high numerical aperture and including an effective imaging region shaped optimally for use in a batch type exposure apparatus and having an imaging magnification with a small absolute value. The catadioptric imaging optical system includes a dioptric first imaging system (G1), which forms a first intermediate image based on light from the first plane (R), a second imaging system (G2), which forms a second intermediate image based on light from the first intermediate image and includes a concave reflection mirror (CM), a third dioptric imaging system (G3), which forms a reduced image on the second plane based on light from the second intermediate image, and a deflecting mirror (M1, M2) arranged in an optical path extending from the first imaging system to the second imaging system and an optical path extending from the second imaging system to the third imaging system. The first imaging system and the second imaging system provide a composite imaging magnification having an absolute value ²12 of less than 0.55, and the third imaging system has an imaging magnification with an absolute value ²3 of less than 0.35.
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