发明名称 |
LIQUID DISCHARGING HEAD BASE, LIQUID DISCHARGING HEAD USING SUCH BASE AND METHOD FOR MANUFACTURING SUCH BASE AND HEAD |
摘要 |
Provided is a liquid discharge head substrate including: a substrate; a heating resistor layer formed on the substrate; a flow path for a liquid; a wiring layer stacked on the heating resistor layer and having an end portion which forms a step portion on the heating resistor layer; and a protective layer covering the heating resistor layer and the wiring layer including the step portion, and formed between the heating resistor layer and the flow path, in which the protective layer is formed by a Cat-CVD method.
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申请公布号 |
EP1982835(A1) |
申请公布日期 |
2008.10.22 |
申请号 |
EP20070708192 |
申请日期 |
2007.02.01 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SAITO, ICHIRO;OZAKI, TERUO;MATSUI, TAKAHIRO;YOKOYAMA, SAKAI;HATSUI, TAKUYA;SHIBATA, KAZUAKI |
分类号 |
B41J2/05;B41J2/16 |
主分类号 |
B41J2/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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