| 摘要 |
A substrate holder and a sawing/sorting machine including a venturi tube are provided to absorb stably a package or a package array by applying the sufficient amount of absorbing force. A fixing head(120) includes a plurality of absorbing holes(132) formed on one surface thereof. The fixing head provides a plurality of internal spaces(127,128a128b) blocked from the outside. A venturi tube(140) is formed in the internal spaces. A plurality of first holes connected to the absorbing holes are formed in the venturi tube. A first supply line(152) is connected to an inflow hole formed at the fixing head in order to supply a first fluid to the internal spaces. The venturi tube includes both ends of opening states. The venturi tube further includes an inlet for receiving the first fluid and an outlet(144) for discharging the first fluid. The fixing head includes an outflow hole(124) for discharging the first fluid.
|
