发明名称 Method for manufacturing a module with a flexible package having a very thin semiconductor chip
摘要 There is provided a flexible package which comprises a flexible substrate on a principal surface of which a plurality of metal wirings are formed, a flexible semiconductor chip attached over the flexible substrate and having a plurality of bonding pads thereon, joint metals for connecting electrically the plurality of bonding pads and the plurality of metal wirings respectively, and a sealing member sandwiched between the flexible substrate and the flexible semiconductor chip. The flexible semiconductor chip in which thickness of the semiconductor chip is reduced smaller than the normally-used thickness to lower the rigidity is mounted. Also, the rigidity of the overall package is made smaller by reducing thicknesses of respective constituent parts of the package such as the flexible substrate, etc. Therefore, generation of the package crack due to displacement can be avoided. In addition, since the sealing member is sandwiched between the flexible substrate and the flexible semiconductor chip, the warpage of the package can be suppressed extremely small. Therefore, flatness of the flexible package as a single product can be assured sufficiently. Further, if a packaging substrate on a principal surface of which a plurality of packaging wirings are formed is prepared and then the plurality of packaging wirings are connected electrically to the plurality of metal wirings respectively, the module with high packaging reliability can be constructed. Moreover, if a plurality of flexible packages are laminated, a MCM having a small total thickness can be constructed. <IMAGE>
申请公布号 EP1028463(B1) 申请公布日期 2008.10.08
申请号 EP20000100243 申请日期 2000.01.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KOSHIO, YASUHIRO
分类号 H01L23/498;H01L21/56;H01L21/60;H01L23/48;H01L25/10 主分类号 H01L23/498
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