PLASMA GUN

摘要

A plasma gun is provided to reduce power consumption by consuming an electron emission source in a cathode part properly. A plasma gun has a cathode part(1a,1f,1g) generating plasma, a feedback electrode part(1e,1h) and a first grid(1c) and a second grid(1d). The feedback electrode part feeds reflected electrons from a target back to a power supply by ejecting plasma toward the target. The first grid and the second grid are formed to control movement speed of the plasma between the cathode part and the feedback electrode part. A DC voltage used in driving the first and the second grid at initial discharge is equal to a DC voltage used in driving the feedback electrode part. A DC voltage used in driving the first and the second grid in main discharge is equal to the DC voltage used in driving the feedback electrode part.