| 摘要 |
A wafer spin chuck assembly is provided to enable a gripper pin to softly grip a wafer and stably maintain a mounted state of the wafer by preventing mobility of the gripper pin due to centrifugal force occurring during the high speed rotation of a spin chuck. A gripper pin supporting structure of a wafer spin chuck includes a rotating shaft(3), a plurality of gear groups(11,12,13), a plurality of gripper pins and a plurality of weight balances(20). The rotating shaft receives power from a motor and performs a rotating operation. The plurality of gear groups are provided inside a spin chuck to be operatively associated with the rotating shaft. Each of the gripper pins is connected to one of the gear groups and performs a straight-line motion in a radial direction. The weight balances are radially provided in a state that the weight balances are engaged with the gear groups by an engagement pin(22).
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