| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a desmearing method having high energy efficiency capable of effectively using a laser beam output of a laser oscillator. SOLUTION: A device is provided with a laser oscillator 10 to generate a laser beam having a wave lengthωdecided beforehand, a SHG element 11 which generates the wave lengthωcomponent and a second harmonic 2ωcomponent and emits both as a single laser beam, an uniform optical system 12 which converts the laser beam emitted from the SHG element 11 to the beam having an uniform energy density distribution, and an irradiation system to irradiate the beam from the uniform optical system to a via hole.</p> |
