| 发明名称 |
INCREASING THE LATERAL RESOLUTION OF ORGANIC VAPOR JET DEPOSITION BY USING A CONFINING GUARD FLOW |
| 摘要 |
The invention relates to a method of depositing an organic material, wherein a carrier gas carrying an organic material is ejecting from the nozzle at a flow velocity that is at least 10 % of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate, and wherein a guard flow is provided around the carrier gas.
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| 申请公布号 |
EP1978570(A1) |
申请公布日期 |
2008.10.08 |
| 申请号 |
EP20080013129 |
申请日期 |
2004.10.22 |
| 申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY |
发明人 |
SHTEIN, MAX;FORREST, STEPHEN R. |
| 分类号 |
H01L51/00;C23C14/04;C23C14/12;H01L51/30;H01L51/40 |
主分类号 |
H01L51/00 |
| 代理机构 |
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