| 摘要 |
An apparatus for inspecting a flat patterned medium is provided to perform an accurate and stable inspection process on the flat patterned medium such as an LCD(Liquid Crystal Display) panel, an electric field-light emission display panel, and a plasma panel, etc. A flat patterned panel(11) is loaded on a stage(10). A pair of guides(14A,14B) are respectively installed at a pair of edges of the stage, which correspond to each other. One or more aligning arms(22A-22D) are installed at both of the guides. One ore more pickers(20A-20D) transfer forces from the aligning arms to a corresponding surface of the flat patterned panel while applying a larger force to a lower surface of the flat patterned panel in comparison with a lower surface of the flat patterned panel. The pickers transfer the forces from the aligning arms so that a force applied to the lower surface of the flat patterned panel is more than twice of a power applied to a surface of the flat patterned panel. |
