| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent substrate with a multilayered antireflection film having conductivity in which a high transmittance can be obtained although a transparent conductive film having a low resistance is used. SOLUTION: The transparent substrate with a multilayered antireflection film having conductivity by laminating a transparent dielectric thin film and a transparent conductive thin film on a transparent substrate, is characterized in that the substrate has, in the order from the transparent substrate side, a first thin film layer of a transparent dielectric material having the refractive index lower than that of the transparent substrate, a second thin film layer of a transparent dielectric material having the refractive index higher than that of the first thin film layer, and a third thin film layer of a transparent conductive material as the outermost layer. These layers are formed on the transparent substrate by determining the optical film thickness of the third thin film layer so as to obtain the desired surface resistance and by determining the optical film thickness of the second thin film layer in such a manner that the sum film thickness with that of the third thin film layer is about λ/2. |
