发明名称 Semiconductor device with horizontal MOSFET and Schottky barrier diode provided on single substrate
摘要 A MOS field-effect transistor includes a semiconductor substrate of a first-conductivity type, a semiconductor layer of the first-conductivity type, a source region of a second-conductivity type, a first drain region of the second-conductivity type, a resurf layer of the second-conductivity type provided in the surface of the semiconductor layer between the source region and the first drain region in contact with the first drain region, and having a lower impurity concentration than the first drain region, a gate insulation film, and a gate electrode provided on the gate insulation film between the source region and resurf layer. A Schottky barrier diode includes a second drain region of the second-conductivity type provided in the surface of the semiconductor layer separate from the first drain region in a direction away from the gate electrode, and a Schottky electrode provided on the semiconductor layer between the first and second drain regions.
申请公布号 US7432579(B2) 申请公布日期 2008.10.07
申请号 US20040959201 申请日期 2004.10.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUDAI TOMOKO;NAKAMURA KAZUTOSHI;NAKAGAWA AKIO
分类号 H01L29/47;H01L29/872;H01L21/8234;H01L27/06;H01L27/07;H01L29/76 主分类号 H01L29/47
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