| 摘要 |
A hybrid waveguide sensor comprises a dielectric layer having one optical signal input section formed in one end thereof and one optical signal output section formed in the other end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the thin metal film; and a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening.
|
