发明名称 |
Piezoelectric thin-film resonator and filter and fabricating method |
摘要 |
A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.
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申请公布号 |
US7432631(B2) |
申请公布日期 |
2008.10.07 |
申请号 |
US20050138893 |
申请日期 |
2005.05.27 |
申请人 |
FUJITSU MEDIA DEVICES LIMITED;FUJITSU LIMITED |
发明人 |
TANIGUCHI SHINJI;NISHIHARA TOKIHIRO;SAKASHITA TAKESHI;YOKOYAMA TSUYOSHI;IWAKI MASAFUMI;UEDA MASANORI;MIYASHITA TSUTOMU |
分类号 |
H01L41/04;H01L41/08;H03H3/02;H03H9/00;H03H9/17;H03H9/56;H03H9/58 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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