| 摘要 |
Disclosed is an electrostatic capacity detection device capable of highly-accurately detecting a change of micro electrostatic capacity of an object to be measured. The electrostatic capacity detection device includes a signal generator, a differential amplifier circuit, and a detector. The signal generator generates a probe signal w(t) to be applied to one end of the object to be measured. The differential amplifier circuit differentiates/amplifies a response signal v1(t) generated at the other end of the terminal to be measured according to application of the probe signal w(t) and a probe signal w(t). The detector detects a change of the electrostatic capacity of the object to be measured, according to the amplification signal v(t) from the differential amplifier circuit. |
