发明名称 Semiconductor device and method of fabricating the same
摘要 A semiconductor device 100 includes an element-forming region having gate electrode 108 formed therein, and a circumferential region formed in the outer circumference of the element-forming region and having an element-isolating region 118 formed therein. On the main surface of the semiconductor substrate 101 , there is formed a parallel pn layer having an N-type drift region 104 and P-type column regions 106 alternately arranged therein. In the circumferential region, there is formed a field electrode 120 , but the field electrode 120 is not formed on the P-type column regions 106 . The P-type column regions 106 in the circumferential region are formed with a depth larger than or equal to that of the P-type column regions 106 in the element-forming region.
申请公布号 US7432134(B2) 申请公布日期 2008.10.07
申请号 US20070943609 申请日期 2007.11.21
申请人 NEC ELECTRONICS CORPORATION 发明人 NINOMIYA HITOSHI;MIURA YOSHINAO
分类号 H01L21/332;H01L29/04 主分类号 H01L21/332
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