| 摘要 |
A capacity element with a simple configuration exhibits excellent production reliability. A semiconductor device 100 includes a capacity element consisting of a lower electrode 102, an SiCN film 107 and an upper electrode 113. In an insulating film 101 on a semiconductor substrate is formed a groove, in which the lower electrode 102 is buried. The lower electrode 102 includes two regions, that is, a first lower electrode 103 and a second lower electrode 105, which are separated from each other via the insulating film 101.
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