发明名称 Evaporation method using infrared guiding heater
摘要 A method for evaporating a solid organic material by sublimation using an infrared guiding heater which minimizes temperature gradients in the bulk of the organic target. The bulk is heated to a temperature below the sublimation temperature of the target. A localized area of the target is sublimated by the infrared guiding heater while regulating the temperature of the bulk. The vapor is then deposited over, and condensed on, a substrate to form a solid organic layer.
申请公布号 US7431807(B2) 申请公布日期 2008.10.07
申请号 US20050030076 申请日期 2005.01.07
申请人 UNIVERSAL DISPLAY CORPORATION 发明人 YAMAMOTO HITOSHI
分类号 C23C14/12;C23C16/448 主分类号 C23C14/12
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