| 发明名称 |
Table device, film-forming apparatus, optical element, semiconductor element, and electric apparatus |
| 摘要 |
A table device for chucking a substrate includes a chucking unit including a porous body, and having a substrate chucking surface, and a conductive film which is disposed on the substrate chucking surface of the chucking unit, and which is grounded.
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| 申请公布号 |
US7431770(B2) |
申请公布日期 |
2008.10.07 |
| 申请号 |
US20040818456 |
申请日期 |
2004.04.05 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
WATANABE NOBUKO |
| 分类号 |
B05C5/00;B23Q3/08;B05B13/02;B05C13/02;B23B5/22;B41J2/175;H01L21/68;H01L51/50;H05B33/10;H05B33/12 |
主分类号 |
B05C5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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