发明名称 Manufacturing method of thick film member pattern
摘要 A method of manufacturing an image forming apparatus having a plurality of electron-emitting members, with row direction wires and column direction wires, in a matrix, and a dielectric layer between the row and column wires. A resist precursor layer is formed by imparting and drying a first photosensitive paste. A second precursor layer is formed by imparting a second photosensitive paste onto the first precursor layer, and by drying the second paste. A precursor pattern is formed by exposing a layered product of the first layer and the second layer through a mask. The exposed layered product is developed, and the dielectric layer is formed by baking the precursor pattern. A shrinkage ratio of the second layer after the baking to the second layer before the baking is larger than a shrinkage ratio of the first layer after the baking to the first layer before the baking.
申请公布号 US7432040(B2) 申请公布日期 2008.10.07
申请号 US20050166102 申请日期 2005.06.27
申请人 CANON KABUSHIKI KAISHA 发明人 WATANABE OSAMU;SUZUKI MASAAKI
分类号 G03F7/26;B05D3/02;B05D7/24;H01B5/14;H01J9/02;H01J11/22;H01J11/34;H01J11/36;H01J11/38;H05K3/06;H05K3/12;H05K3/28 主分类号 G03F7/26
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