INSPECTION DEVICE, INSPECTION METHOD, AND MANUFACTURING METHOD OF PATTERN SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for inspecting a defect with high detection sensitivity at high speed. SOLUTION: An embodiment of the defect inspection device 10 in the present invention is equipped with: a laser light source 11 for generating a light beam; an objective lens 13 for condensing light beams emitted from the laser light source 11 and forming a light spot on the surface of a sample W; a prism 15 for splitting a light beam reflected by the sample W into two light beams; light receiving elements 17a, 17b for receiving respectively the light beams split by the prism 15 and outputting an output signal based on the quantity of received light; and a real defect determination part 23 for determining to be a real defect when an output signal from the light receiving element 17a and an output signal from the light receiving element 17b are detected almost simultaneously. COPYRIGHT: (C)2008,JPO&INPIT