发明名称 METHODS OF FORMING WIRING TO TRANSISTOR AND RELATED TRANSISTOR
摘要 Methods of wiring to a transistor and a related transistor are disclosed. In one embodiment, the method includes a method of forming wiring to a transistor, the method comprising: forming a transistor on a semiconductor-on-insulator (SOI) substrate using masks that are mirror images of an intended layout, the forming including forming a gate and a source/drain region for each and a channel, the SOI substrate including a semiconductor-on-insulator (SOI) layer, a buried insulator layer and a silicon substrate; forming a dielectric layer over the transistor; bonding the dielectric layer to another substrate; removing the silicon substrate from the SOI substrate to the buried insulator layer; forming a contact to each of the source/drain region and the gate from a channel side of the gate; and forming at least one wiring to the contacts on the channel side of the gate.
申请公布号 US2008206977(A1) 申请公布日期 2008.08.28
申请号 US20070677598 申请日期 2007.02.22
申请人 FRANK DAVID J;LA TULIPE DOUGLAS C;STEEN STEVEN E;TOPOL ANNA W 发明人 FRANK DAVID J.;LA TULIPE DOUGLAS C.;STEEN STEVEN E.;TOPOL ANNA W.
分类号 H01L21/44 主分类号 H01L21/44
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