MAGNETIC SENSOR DEVICE WITH FIELD GENERATOR AND SENSOR ELEMENT

摘要

The invention relates to a magnetic sensor device (100) that can for example be used for the detection of magnetized particles (1) and that comprises at least one conductor (111, 113) and at least one magnetic sensor element, e.g. a GMR element (112). To compensate for their different thicknesses(d, h), these components are placed on a first and second region (R1, R2), respectively, that have different distances from a sensitive plane(E) ofthe magnetic sensor element(112). Thus a magnetic excitation field (H) generated by the conductor (111, 113) can be made perpendicular to said sensitive plane (E) in the magnetic sensor element (112). In a preferred production process, the conductor (111, 113) is for example partially embedded in a channel that is etched into the surface of a substrate (114).