发明名称 TRANSPORTING APPARATUS FOR DISC-SHAPED WORKPIECES
摘要 <p>A transporting apparatus for disc-shaped workpieces (2, 3, 4, 5, 7) comprises a horizontally movable transporting arm with two elongate carrying elements (26, 27) arranged thereon and serving for receiving workpieces, a cassette (20) having a comb structure (18) on two opposite sides for the purpose of receiving workpieces (7), the carrying elements (26, 27) and the comb structure (18) being formed in such a way that they can be introduced contactlessly between two adjacent combs (19) with workpieces placed therein for the purpose of vertically lifting off or placing a workpiece (7), the carrying elements (26, 27) being arranged in such a way that they are positioned essentially in each case adjacent parallel to the comb structure along a comb in the event of cassette engagement and that a scanning beam (35) is provided in this region for workpiece detection (7) and the position thereof and that the scanning beam (35) can be positioned in terms of height relative to the cassette (20), the scanning beam (35) being guided in a manner tilted by a small angle (34) relative to the horizontal workpiece plane.</p>
申请公布号 KR20080078810(A) 申请公布日期 2008.08.28
申请号 KR20087012802 申请日期 2006.09.15
申请人 OC OERLIKON BALZERS AG 发明人 SCHOLTE VAN MAST BART;CHRIST HOLGER
分类号 H01L21/677 主分类号 H01L21/677
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