| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve not only safety and reliability in operation performance of a heater power source in a plasma treatment apparatus comprising a heating object in a high frequency electrode, but also reproducibility and reliability of process performance by reducing, as much as possible, a power loss of a high frequency generated on a heater feeding line. <P>SOLUTION: Within a casing 120 of a filter unit 54(IN), in order to obtain extremely great induction with an air core without including a magnetic core of ferrite, etc. , from the point of view of preventing heating (power loss), each of three air-core coil units [A(1), B(1), C(1)], [A(2), B(2), C(2)] constituting first-stage coils 108(1), 108(2), respectively, has a thick coil wire and a coil size against the conventional common sense, in addition to a function of a feeding line causing a sufficiently great current to flow from a heater power source to an inner heating wire. <P>COPYRIGHT: (C)2008,JPO&INPIT |
