PIEZOELECTRIC ACTUATORS AND METHODS OF FABRICATING SAME

摘要

Processes of fabricating an actuator comprises bonding an unpolled element to a substrate and thereafter poling the bonded element for providing the element with an electro-active response property. In differing modes of the process, the unpolled element can comprise one or more of (for example) a piezoelectric material (e.g., lead zirconate titanate); a piezorestrictive material; and/or a ferroelectric material. Actuators fabricated by the processes are also described.