CONTAMINATION ANALYZING APPARATUS, ITS METHOD, AND RETICLE WASHING SYSTEM USING IT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method for analyzing contamination capable of improving the reliability of inspection when the contamination remaining on the inspection surface is analyzed after washing an inspecting object such as a reticle.

SOLUTION: The apparatus for analyzing the contamination remaining on the inspection surface of the inspecting object comprises a sampling module for bringing the inspection surface of the inspecting object into contact with liquid and extracting sampling liquid, and an analyzer for analyzing the contaminant remaining on the inspection surface of the inspecting object from the sampling liquid. The sampling module comprises a liquid tank having a storage space capable of storing the inspection surface of the inspecting object, and a liquid supply nozzle for supplying the liquid to the storage space of the liquid tank.

COPYRIGHT: (C)2008,JPO&INPIT