| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently cope with required accuracy, even when a metal linear scale is used for a filter manufacturing device, or the like, for which high accuracy as the detection accuracy of the linear scale is required. SOLUTION: A pulse signal generation means divides a signal, having each prescribed length outputted from a linear scale means into signals having a sufficiently smaller period than a control pulse. Then, a control pulse generating means generates a control pulse by counting the pulse signals as many as a prescribed number. In the process for generating the control pulse, when the environmental temperature of a pattern formation device changes, a prescribed length of the signal outputted from the linear scale means is changed, corresponding to the temperature change. The control pulse generation means generates a control pulse, by changing the prescribed number to be counted corresponding to the rate of a change of the prescribed length of the signal outputted from the linear scale means. COPYRIGHT: (C)2008,JPO&INPIT
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