发明名称 |
Spectrometer with collimated input light |
摘要 |
An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectrometer to spatially disperse wavelengths in and around the VUV in such a manner as to generate a substantially flat field focal plane, suitable for use in combination with an array detector. Some embodiments utilize prism based spectrometers. Some embodiments utilize detector elements that may be movable and/or located within the spectrometer. In some embodiments, collimated light may be provided as an input to the spectrometer.
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申请公布号 |
US2008204710(A1) |
申请公布日期 |
2008.08.28 |
申请号 |
US20070711592 |
申请日期 |
2007.02.27 |
申请人 |
HARRISON DALE A;HAYES ANTHONY T |
发明人 |
HARRISON DALE A.;HAYES ANTHONY T. |
分类号 |
G01J3/28;G01J3/00 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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