| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-performance movable table controller with high positioning accuracy and a short settling time, by distributing the thrust to an actuator in consideration of a cable weight. <P>SOLUTION: The movable table controller is provided with actuators 105 and 106 for driving a movable table 107 connected to a fixing part by a cable such as a power line, actuator thrust controllers 103 and 104 for controlling the thrust generated in the actuator, a controller 101 for calculating a center-of-gravity thrust command from a positioning command of the movable table 107, and a thrust command converter 10 for converting the center-of-gravity thrust command into an actuator thrust command. The thrust command converter 10 comprises a center-of-gravity position converter 12 for converting the center-of-gravity position only for the movable table 107 into the center-of-gravity position including the cable, and a cable tension calculator 13 for calculating the tension of the cable using a positioning command value or a feedback value of the movable table 107. <P>COPYRIGHT: (C)2008,JPO&INPIT |
