| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film transistor array substrate wherein contact holes which can surely establish conduction with a semiconductor layer can be effectively formed, and to provide its manufacturing method and a display device. SOLUTION: The thin-film transistor array substrate 100 comprises a semiconductor layer 3 which is formed on a substrate 1 and has a source region 31, a drain region 32, and a channel region 33; gate insulation film 4a which covers the semiconductor layer 3 and has openings 4b above the source region 31 and drain region 32; gate electrode 5 disposed face to face with the channel region 33 via the gate insulation film 4a; interlayer insulation film 6 which covers the gate electrode 5 and gate insulation film 4a and fills up the openings 4b; and signal interconnection electrodes 71 and 72 which are connected to the source region 31 and drain region 32, respectively, via contact holes 10a which penetrate the interlayer insulation film 6 on the inner side than the side face of the openings 4b. COPYRIGHT: (C)2008,JPO&INPIT |
