| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode for plasma generation in which a condition in formation of a carbon nano structure can be mitigated and electrons are discharged in multiple directions and a high strength plasma can be generated uniformly at a low voltage. <P>SOLUTION: The electrode is composed of an electrode base plate 3 made of a metal plate consisting of a porous nickel, and a carbon nano wall of a carbon nano structure is formed on a whole surface of a metal portion 5 around an inner hole 4 by including one surface of the porous metal plate 3. In the whole surface of the metal portion 5, a normal of each predetermined region of the surface turns to various directions irregularly and at random. <P>COPYRIGHT: (C)2008,JPO&INPIT |
