| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an organic thin film which enables rapid formation of a dense monomolecular film with less impurities by the use of a metal type surfactant oligomer having hydrolyzable groups. SOLUTION: The method has (A) the process of mixing a metal type surfactant having at least one hydrolyzable group with a compound capable of interacting with the metal type surfactant in an organic solvent so as to prepare a solution for formation of an organic thin film which contains 20-2,000 ppm of a hydroxy-containing compound produced by hydrolysis of the metal type surfactant and (B) the process of bringing the organic-solvent solution prepared in the process (A) in contact with a substrate. The metal surfactant consists of at least one of oligomers of compounds of formula (I). COPYRIGHT: (C)2008,JPO&INPIT |
