发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device, which allows an organic semiconductor material to be dissolved in a solvent the properties of which are controlled with no need to select a single solvent having various properties, and allows the carrier mobility of a thin film transistor to be increased. SOLUTION: A method of manufacturing a semiconductor device having an organic semiconductor layer on a substrate is characterized in that the organic semiconductor layer 15 is formed by applying a solution, which is obtained by dissolving an organic semiconductor material in a mixture of solvents having different boiling points, to the substrate. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008198992(A) 申请公布日期 2008.08.28
申请号 JP20070335880 申请日期 2007.12.27
申请人 SONY CORP 发明人 OE TAKAHIRO
分类号 H01L21/368;H01L21/336;H01L29/786;H01L51/05;H01L51/40 主分类号 H01L21/368
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